Application

Ultrapure Water

Key Features

The importance of ultrapure water used in the semiconductor, OLED, LCD,
and other electronics industries is increasing, and as related industries advance,
the purity and reliability standards for ultrapure water are becoming even stricter.

TRILITE® ultrapure water ion exchange resins have been delivered globally and internationally to ultrapure water facilities in the semiconductor, display (OLED, LCD) industries, and have acquired references of trust. They are contributing to improving our customers' competitiveness through stable quality control and on-time delivery. TRILITE® ion exchange resins for ultrapure water are divided into URR100, UPR200, UPR300, and UPR400 series depending on the required ultrapure water quality.

TRILITE® ion exchange resins for ultrapure water feature

Strict standard for uniformity coefficient (1.1↓), to result in high operating capacity at fast service flow

Very high conversion rate of resins to minimize ionic leakage(H+, OH-)

Strict quality control over TOC(Total organic carbon) and trace metal ions

Ultrapure Water
Production
Process

Product
Selection Guide

Product Selection Guide table
Product Name Outlet condition Features and Application
UPRM100U Guarantee) Resistivity > 17.0㏁∙cm
Actual) Resistivity > 18.0㏁∙cm
General electronics
Demineralization, Final polisher
UPRM200U Resistivity > 18.1㏁∙cm(in 30 min)
△TOC < 5 ppb (in 120min)
Display Demineralization,
Final polisher
UPRM300U Resistivity > 18.2㏁∙cm(in 30 min)
△TOC < 1 ppb (in 180min)
Display,
Semiconductor grade Final polisher
UPRM400U Resistivity > 18.2㏁∙cm(in 30 min)
△TOC < 1 ppb (in 180min)
Metal impurity (ppm, as Dry Base)
Na<1, Fe<1, Zn<0.5, Al<0.5, Cu<0.5
Semiconductor grade
Final polisher
UPHR1 Resistivity > 18.2㏁∙cm(in 24hr)
△TOC < 1 ppb (in 24hr)
Removal of H2O2 in semiconductors
CLR-B3UP Resistivity > 17.0㏁∙cm(in 48hr)
△TOC < 5 ppb (in 48hr)
Ultrapure Water boron removal

Product

Product table
Product Name Product Category Information TDS

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Posted on March 28, 2023

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