Application

Ion Exchange Resins for Ultrapure Water

Samyang's TRILITE® ion exchange resins for ultrapure water are optimized for display (OLED/LCD) and semiconductor ultrapure water production, with a uniformity coefficient of 1.1 or less and ionic conversion of at least 99.9% (H⁺) and 97.0% (OH⁻).

Key Features

The importance of ultrapure water used in the semiconductor, OLED, LCD,
and other electronics industries is increasing, and as related industries advance,
the purity and reliability standards for ultrapure water are becoming even stricter.

TRILITE® ion exchange resins for ultrapure water have been delivered domestically and internationally to ultrapure water facilities in the semiconductor, display (OLED, LCD) industries, and have acquired references of trust. They are contributing to improving our customers' competitiveness through stable quality control and timely delivery. TRILITE® ion exchange resins for ultrapure water are divided into URR100, UPR200, UPR300, and UPR400 series depending on the required ultrapure water quality.

TRILITE® ion exchange resins for ultrapure water feature
  • TRILITE® ion exchange resins for ultrapure water have a very high level of uniformity coefficient (less than 1.1) to achieve high operational exchange capacity even at high flow rates.
  • To minimize ion leakage, it has very high H and OH conversion rates.
  • Strict management is maintained to control total organic carbon (TOC) and trace metal ion leakage.

Ultrapure Water
Production
Process

Ultrapure water production purifies raw water step by step into industrial water, pure water, and finally ultrapure water. The process consists of Pre-treatment → Make-up system → Polishing system.

  • Step 1 – Pre-treatment :

    Raw water is taken in and passed through a multi-media filter (MMF) and an activated carbon filter to remove suspended solids (SS) and residual chlorine.
  • Step 2 – Make-up system :

    Dissolved ions, organic matter (TOC), bacteria, dissolved oxygen, and carbon dioxide are thoroughly removed.
  • Step 3 – Polishing system :

    The final step polishes out the remaining trace ions, particles, and organics. Depending on the required grade, it is divided into display (OLED) grade and semiconductor grade; the semiconductor grade adds H2O2 removal and boron removal processes.

Product
Selection Guide

Product Selection Guide table
Product Name Outlet condition Features and Application
UPRM100U Guarantee) Resistivity > 17.0㏁∙cm
Actual) Resistivity > 18.0㏁∙cm
General electronics
Demineralization, Final polisher
UPRM200U Resistivity > 18.1㏁∙cm(in 30 min)
△TOC < 5 ppb (in 120min)
Display Demineralization,
Final polisher
UPRM300U Resistivity > 18.2㏁∙cm(in 30 min)
△TOC < 1 ppb (in 180min)
Display,
Semiconductor grade Final polisher
UPRM400U Resistivity > 18.2㏁∙cm(in 30 min)
△TOC < 1 ppb (in 180min)
Metal impurity (ppm, as Dry Base)
Na<1, Fe<1, Zn<0.5, Al<0.5
Semiconductor grade
Final polisher
UPHR1 Resistivity > 18.2㏁∙cm(in 24hr)
△TOC < 1 ppb (in 24hr)
Removal of organic contaminants in
semiconductors
CLR-B3UP Resistivity > 17.0㏁∙cm(in 48hr)
△TOC < 5 ppb (in 48hr)
Ultrapure Water boron removal

Product

Product table
Product Name Product Category Information TDS

Technical Data

Technical Data table
Title Download

FAQ

  • Q. What is the role of ultrapure water in semiconductor manufacturing, and why is it important?

    Ultrapure water is high-purity industrial water from which minerals, organics, particles, microorganisms, and dissolved gases have been filtered out, leaving it as close as possible to pure water molecules. Wafers must be rinsed after every repeated process step, and because nanometer-scale processes are sensitive to even the finest dust, ultrapure water is essential for ensuring cleanliness. Ultrapure water quality directly affects defect minimization and yield improvement.

    • Ensuring cleanliness : Nanometer-scale processes are sensitive to even the finest dust
    • Reducing defects : Minimizes defects and improves yield

  • Q. What are the differences between Samyang's TRILITE® ultrapure water resins UPRM100U, 200U, 300U, and 400U?

  • Q. Why is boron removed separately in semiconductor manufacturing?

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Posted on March 28, 2023

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